Carbon layers cleaning from inside of narrow gaps by a RF glow discharge

The paper focuses on the utilization of radiofrequency discharges at intermediate pressures for plasma removal of carbon residuals or layers from narrow gaps and channels. It is shown that by proper handling of the discharge power and pressure it is possible to control the development of plasma inside narrow gaps, in the proximity of surfaces to be cleaned. The discharge operation inside gaps having the width in the range 0.6-2 mm was demonstrated. The cleaning effectiveness is exemplified for castellated surfaces having rectangular gaps coated with hydrogenated amorphous carbon layers. Cleaning of large surfaces can be approached with a movable “plasma shower” type device.