Production and characterization of wear resistant Ti(C,N) coatings manufactured by modified chemical vapor deposition process

► Ti(C,N) coating layers produced by MT-CVD and a modified HT-CVD method. ► C/N ratio of Ti(C,N) layers controlled by the deposition conditions. ► Star-shaped and lenticular-like Ti(C,N) crystallites form the mod-HT-CVD layer. ► Ti(C,N) layer formation investigated by interrupting the mod-HT-CVD process. ► Mod-HT-CVD Ti(C,N) layers presented higher wear resistance than MT-CVD layers.