Low temperature sputter deposition of SnOx:Sb films for transparent conducting oxide applications

►Reactive dcMS of SnOx:Sb without any additional heating of the substrate. ►Narrow process window for the oxygen content for transparent conducting films. ►At low oxygen content, yellow brownish SnO occurs leading to scattering by defects. ►At high O2 content, optical properties improve-electrical properties deteriorate. ►The above is attributed to oxygen ion bombardment causing defect formation.