کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
10668974 1008488 2005 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Structures and tribological properties of diamond-like carbon films prepared by plasma-based ion implantation on Si
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Structures and tribological properties of diamond-like carbon films prepared by plasma-based ion implantation on Si
چکیده انگلیسی
DLC films ranging from 5 to 180 nm in thickness have been prepared by plasma-based ion implantation (PBII) with C on Si. The structures of the films were studied with XPS and Raman spectroscopy. The nanohardness and the intrinsic stress of the films were measured. Dry sliding wear experiments have been carried out, using a ball-on-disc tester, to investigate the tribological properties of DLC films against alumina balls, employing various normal applied loads and reciprocating frequencies. For comparison, DLC films prepared by plasma-assisted chemical vapor deposition (PACVD) on Si were also investigated. The results show that the films prepared by PBII exhibit more significant improvement in tribological properties than the films prepared by PACVD because the former present higher sp3/sp2 ratio, higher hardness and lower stress than the latter. The effects of the film thickness, the applied loads and the reciprocating frequencies on the tribological properties are also presented.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 191, Issue 1, 1 February 2005, Pages 90-95
نویسندگان
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