Scanning transmission electron microscopy imaging dynamics at low accelerating voltages

► Both elastic and inelastic scattering in STEM are acceleration voltage dependent. ► HAADF, EELS and ABF imaging are assessed with a view to optimum imaging. ► Lower accelerating voltages improve STEM EELS contrast in very thin crystals. ► Higher accelerating voltages give better STEM EELS contrast in thicker crystals. ► At fixed resolution, higher accelerating voltage aids ABF imaging of light elements.