Spatially resolved diffractometry with atomic-column resolution

► We demonstrated spatially resolved diffractometry with high spatial resolution using STEM. ► Atomic columns are clearly observed in dark field images obtained using the excess Kikuchi band even in small solid-angle detection. ► Atomic-column contrasts in dark field images are shifted by changing the azimuthal scattering angle. ► It is interpretable on the basis of the impact parameter in Rutherford scattering.