Direct deformation study of AFM probe tips modified by hydrophobic alkylsilane self-assembled monolayers

► We developed a method to directly compare the shape evolution of AFM tips. ► Nanoscale damage and wear of probe tips in tapping mode scans were characterized. ► Surface modification by SAM to achieve hydrophobicity in as short as 2 min. ► Wear length and volume were used to quantify the wear of SAM coatings on AFM tips.