High resolution surface morphology measurements using EBSD cross-correlation techniques and AFM

► Test sample was wedge indentation in single-crystal silicon. ► EBSD cross-correlation techniques used to measure surface orientation across indentation. ► Surface morphology/uplift was calculated from surface orientation profile. ► Characterized surface morphology with AFM; good agreement with EBSD obtained. ► Modeled uplift as dilatation below indentation gave good agreement with experiment.