Transmission electron microscopy at 20Â kV for imaging and spectroscopy

► A highly stable low voltage (20 kV) instrument equipped has been demonstrated. ► Single-layer graphene shows a lattice transfer of 213 pm with tilted illumination. ► C60 molecules withstand an about two orders of magnitude higher electron dose than at 80 kV. ► Dielectric properties and narrow band gaps have been determined on the example of Si and Ge.