کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
10672631 1009961 2005 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
A method of dynamic chromatic aberration correction in low-voltage scanning electron microscopes
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
A method of dynamic chromatic aberration correction in low-voltage scanning electron microscopes
چکیده انگلیسی
A time-of-flight concept that dynamically corrects for chromatic aberration effects in scanning electron microscopes (SEMs) is presented. The method is predicted to reduce the microscope's chromatic aberration by an order of magnitude. The scheme should significantly improve the spatial resolution of low-voltage scanning electron microscopes (LVSEMs). The dynamic means of correcting for chromatic aberration also allows for the possibility of obtaining high image resolution from electron guns that have relatively large energy spreads.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Ultramicroscopy - Volume 103, Issue 4, July 2005, Pages 255-260
نویسندگان
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