کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
10675369 1010657 2005 16 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
A quantitative and comparative study of sputtering yields in Au
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
A quantitative and comparative study of sputtering yields in Au
چکیده انگلیسی
We have systematically tested two entirely independent, empirical potentials (EAM and MD/MC CEM) which are widely used in classical molecular dynamics simulations by simulating Xe ion impacts to the Au(1 1 1) surface in the broad energy range between 0.1 and 200 keV. Special attention is paid to ensure that the simulated results are statistically significant. We have also compared simulations to experimental results on sputtering yields and crater production. Both potentials bring about qualitatively similar outcomes of the collision cascades, giving good confidence that the previous conclusions drawn from simulations on heat spike behaviour in dense metals are valid. However, the quantitative results are different. The MD/MC CEM potential has clearly better agreement with experimental sputtering yield data than the EAM potential, although neither potential agrees with experiments in the full energy range studied.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 239, Issue 4, October 2005, Pages 331-346
نویسندگان
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