کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10706225 | 1023382 | 2016 | 19 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Thickness-controlled multilayer hexagonal boron nitride film prepared by plasma-enhanced chemical vapor deposition
ترجمه فارسی عنوان
فیلم کنترل شده با ضخامت نیکل دی اکسید کربن شش ضلعی که توسط پلاسما تهیه شده است
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کلمات کلیدی
نیترید بور بور شش ضلعی، پوسیدگی بخار شیمیایی، کنترل ضخامت فویل پلاتین،
موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
فیزیک ماده چگال
چکیده انگلیسی
Two-dimensional (2D) hexagonal boron nitride (h-BN) is a thin insulating material that can be used to enhance the electrical and optical properties of other 2D materials when used as a substrate or a capping layer, owing to its absence of dangling bonds on the surface. The use of multilayer h-BN films is often required in such applications to realize high material performance. However, previous works have focused mostly on the synthesis of monolayer or few-layer h-BN films. Herein we report a method to control the thickness of h-BN film up to the centimeter scale by means of plasma-enhanced chemical vapor deposition (PECVD). The thickness of the h-BN film is controlled by varying the deposition time of borazine precursor onto a monolayer h-BN film on a Pt foil substrate at room temperature. The resultant film is then annealed at high temperature (1050 °C) to increase the crystallinity of the h-BN. Monolayer h-BN film grown on Pt foil used as a buffer layer is of importance to improve uniformity and smooth surface of the multilayer h-BN film over the whole area. We further demonstrate that our multilayer h-BN film is very useful in graphene/h-BN/SiO2 heterostructures as a charge-blocking layer between graphene and SiO2.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Current Applied Physics - Volume 16, Issue 9, September 2016, Pages 1229-1235
Journal: Current Applied Physics - Volume 16, Issue 9, September 2016, Pages 1229-1235
نویسندگان
Ji-Hoon Park, Soo Ho Choi, Jiong Zhao, Seunghyun Song, Woochul Yang, Soo Min Kim, Ki Kang Kim, Young Hee Lee,