Magnetic properties of anisotropic Pr-Fe-B films with different deposition rates and pressures

► The magnetic properties of Pr-Fe-B films are sensitive to deposition rate and sputtering gas pressure. ► The highest coercivity and the best squareness are obtained in Mo(50 nm)/Pr-Fe-B(600 nm)/Mo(50 nm) films. ► The texture and the deposition pressure have a reverse relationship. ► High deposition rates and argon pressures result in high coercivity and low remanence.