Study on shop floor control system in semiconductor fabrication by self-organizing map-based intelligent multi-controller

To confirm semiconductor wafer fabrication (FAB) operating characteristics, the scheduling decisions of shop floor control systems (SFCS) must develop a multiple scheduling rules (MSRs) approach in FABs. However, if a classical machine learning approach is used, an SFCS in FABs knowledge base (KB) can be developed by using the appropriate MSR strategy (this method is called an intelligent multi-controller in this study) as obtained from training examples. A classical machine learning approach main disadvantage is that the classes (scheduling decision variables) to which training examples are assigned must be pre-defined. This process becomes an intolerably time-consuming task. In addition, although the best decision rule can be determined for each scheduling decision variable, the combination of all the decision rules may not simultaneously satisfy the global objective function. To address these issues, this study proposes an intelligent multi-controller that incorporates three main mechanisms: (1) a simulation-based training example generation mechanism, (2) a data preprocessing mechanism, and (3) a self-organizing map (SOM)-based MSRs selection mechanism. These mechanisms can overcome the long training time problem of the classical machine learning approach in the training examples generation phase. Under various production performance criteria over a long period, the proposed intelligent multi-controller approach yields better system performance than fixed decision scheduling rules for each of the decision variables at the start of each production interval.

► A classical machine learning approach is not suitable for building KB in SFCS of FAB.
► We proposed SOM-based MSRs selection mechanism to choose the most appropriate MSR.
► The results yield better system performance than fixed decision rule in two criteria.
► The proposed approach is efficient enough to be incorporated in the operation of FAB.