Surface chemical conversion of 3-glycidoxypropyldimethylethoxysilane on hydroxylated silicon surface: FT-IR, contact angle and ellipsometry analysis

The chemical conversion of the top surface of 3-glycidoxypropyldimethylethoxysilane (GPDMES) on hyroxylated silicon surface has been studied as a function of reaction time. A multiple-step procedure was applied in this study. At first, GPDMES molecules were self-assembled on the hydroxylated silicon surface. The second step was the modification of epoxy groups with 3,3′-iminodipropionitrile and the last step was the amidoximation reaction of nitrile groups. Existence of the monolayers covalently attached to silicon surfaces were revealed by X-ray photoelectron spectroscopy and Fourier transform infrared spectroscopy (FT-IR). Modification, conversion and thickness of surfaces were followed by FT-IR and ellipsometry analysis.

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► Surface chemical conversion has been studied as a function of reaction time.
► The absorbance shows a good linear relationship with the thickness of surface.
► FT-IR and ellipsometry can provide rapid, nondestructive thickness measurement system.