Nanocrystalline silicon carbide thin film electrodes for lithium-ion batteries

• The lithiated and delithiated phenomena of nc-SiC film electrodes were observed.

Nc-SiC film electrodes fabricated by using modified PECVD growth on metallic current collector substrates were identified as possible anode materials for rechargeable lithium batteries. The anlysis of both Raman spectra and HRTEM photographics demonstrated that the Nc-SiC films consist of nanocrystallite 4H-SiC surrounded by amorphous SiC networks. A specific discharge capacity of 309 mAh/g of Nc-SiC film anodes was found to be stable over 60 cycles at the C/10 (charge) rate and C/5 (discharge) rate. The effects of forming Li4C layers in lithiation in enhancing the electrochemical behavior of Nc- SiC film anodes are discussed.