Fabrication of Li2O-B2O3-P2O5 solid electrolyte by aerosol flame deposition for thin film batteries

XRD analysis revealed that a crystalline phase of LiCl was formed in the glass soot as well as amorphous boron and phosphorus oxides, and the crystalline LiCl found in deposited glass soot completely disappeared by heat treatment. The correlation between the structural modification of glass network, compositional variation and the conductivity was characterized by Raman spectroscopy. The glass electrolyte fabricated in this study exhibited a maximum conductivity of about 10− 7 S/cm at 30 sccm flow rate of BCl3 and POCl3.