Gaseous phase studies of new copper(II) carboxylate complexes with tert-butylamine as potential precursors for chemical vapor deposition (CVD)

► New [Cu2(tBuNH2)2(μ-O2CR)4] compounds were synthesized.► The complexes were characterized in the solid state and in the gaseous phase. ► In CVD experiments the conformal copper layers were formed with no reducing agents. ► The X-ray structure of the (tBuNH3)+(C3F7CO2)− ion pair was described.