Characterization of amorphous Pt/ZnO films grown on silicon(1 0 0) substrates by a photochemical metal organic deposition and their potential use as gas sensors

Pure and 10% Pt-loaded zinc oxide thin films have been successfully prepared by direct UV irradiation of bis(β-diketonate)zinc(II) and Pt(II) precursor complexes spin-coated on Si(1 0 0) substrates. The surface morphology of the films was characterized using atomic force microscopy (AFM) and it showed that the as-photodeposited films are amorphous and have a rougher surface than thermally treated films. The chemical composition of the films was determined by X-ray photoelectron spectroscopy (XPS). The results indicated the presence of ZnO and PtO on the surface of as-deposited loaded zinc oxide films. Gas sensing tests reveal that as-deposited 10% Pt/ZnO films exhibit a better response than pure ZnO films towards 20 ppm carbon monoxide at an operating temperature of 250 °C. The sensors also have fast response and recovery characteristics.

Pt loaded zinc oxide thin films have been successfully prepared by direct UV irradiation of amorphous films of β-diketonate complexes on Si(1 0 0) substrates. Photodeposited films were characterized by X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM). Sensing capacities of the Pt/ZnO films towards carbon monoxide were evaluated.Figure optionsDownload as PowerPoint slide