The APCVD of tungsten oxide thin films from reaction of WCl6 with ethanol and results on their gas-sensing properties

The APCVD reaction of WCl6 with ethanol was examined to deposit tungsten oxide on gas sensor substrates. Deposited films, which were WO3−x, displayed a different morphology than those seen previously for CVD tungsten oxide. The gas-sensing properties of the deposited films were examined.

The APCVD reaction of WCl6 with ethanol was examined to deposit tungsten oxide on gas sensor substrates. Deposited films, which were WO3−x, displayed a different morphology than those seen previously for CVD tungsten oxide. The gas-sensing properties of the deposited films were examined.Figure optionsDownload as PowerPoint slide