Effects of silane on the interfacial fracture of a parylene film over a stainless steel substrate

► An integrated experimental and modeling approach was applied to characterize effects of silane on interfacial fracture behavior of a parylene film over a stainless steel substrate. ► AFM measurements were obtained for the adhesion of parylene over stainless steel in the presence and absence wiht γ-methacryloxypropyltrimethoxysilane(γ-MPS). ► Brazil nut test was also used to measure interfacial fracture energy release rates over a wide range of mode mixities. ► Good agreement was achieved between these measurements and predictions from both zone and row fracture mechanics models.