کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1429745 | 987180 | 2011 | 6 صفحه PDF | دانلود رایگان |
Undoped (DLC), nitrogen-doped (N-DLC) and platinum/ruthenium doped diamond-like carbon (PtRu-DLC) thin films were deposited on p-Si (100) substrates using a DC magnetron sputtering deposition system. The chemical composition, bonding structure, surface morphology and adhesion strength of the films were characterized using X-ray photoelectron spectroscopy (XPS), micro-Raman spectroscopy, atomic force microscopy (AFM) and micro-scratch test, respectively. The corrosion behavior of the films in a Hank's solution was investigated using potentiodynamic polarization test. The corrosion results revealed that the PtRu-DLC film had the highest corrosion potential among the films used in this study.
► DLC thin films were deposited on Si substrates via dc magnetron sputtering.
► Some DLC films were doped with N and/or Pt/Ru.
► The film corrosion behavior was studied in a Hank solution with polarization test.
► The PtRu-DLC film showed the highest corrosion potential among the films studied.
Journal: Materials Science and Engineering: C - Volume 31, Issue 7, 10 October 2011, Pages 1539–1544