کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1431055 1509189 2008 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
The properties of aluminum-doped zinc oxide thin films prepared by rf-magnetron sputtering from nanopowder targets
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد بیومتریال
پیش نمایش صفحه اول مقاله
The properties of aluminum-doped zinc oxide thin films prepared by rf-magnetron sputtering from nanopowder targets
چکیده انگلیسی

Aluminum-doped zinc oxide (ZnO:Al) films were deposited onto glass substrates by rf-magnetron sputtering at ambient temperature using, for the first time, doped nanocrystalline powder synthesized by the sol–gel method. The effects of aluminum on structural, electrical, morphological and optical properties were investigated. The films showed a hexagonal wurtzite structure and high preferential orientation in the (002) crystallographic direction. Scanning electron microscopy (SEM) and atomic force microscopy (AFM) were used to study the films morphology. The obtained samples have a typical columnar structure and a very smooth surface. The optical transmittance spectra showed transmittance higher than 90% within the visible wavelength region. A minimum resistivity of 5.436 · 10− 5 Ω cm at room temperature was obtained for the 3.0 at.% Al-doped film.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Science and Engineering: C - Volume 28, Issues 5–6, 1 July 2008, Pages 613–617
نویسندگان
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