Voltage effect of corona poling on characteristics of PbZrxTi1−xO3 (PZT) film

The paper investigates the voltage effect of corona poling on the characteristics of PbZrxTi1−xO3 (PZT) thin film. Purchased PZT powder and lab-made PZT solution were mixed together as sol-gel that was spin-coated on titanium (Ti) substrate. X-ray diffractometer (XRD), scanning electron microscopy (SEM), impedance analyzer were utilized to measure the orientation and dielectric characteristics of films for comparison. The experimental results indicated that the poling voltage would not affect the orientation of crystallization, microstructure and grain size of PZT film surface. However, the higher applied poling voltage would result in better charge storage capacity and energy transfer efficiency of the film.