Highly porous titania films coated on sub-micron particles with tunable thickness by molecular layer deposition in a fluidized bed reactor

Titanium alkoxide (titanicone) thin films were coated on large quantities of sub-micron sized silica particles at 100 °C using molecular layer deposition (MLD) in a fluidized bed reactor. Titanium tetrachloride and ethylene glycol were used as precursors. The content of titanium on the particles increased linearly as the number of MLD coating cycles increased. The conformity of the films, with a thickness of ~12 nm, was verified using TEM for silica particles coated with 50 cycles of titanicone. The composition of the titanicone films was confirmed using energy dispersive X-ray spectrometry. Porous titanium oxide films were formed for the particles coated with 50 cycles of titanicone MLD by oxidation in air at 400 °C or by decomposition of the organic components of the titanicone films in the presence of water. The thicknesses of the films were reduced from ~12 nm to ~8 nm after oxidation in air at 400 °C for 1 hr. The effect of aging on the titanicone films was studied at different lengths of aging time in the presence of water. A greatly increased surface area of 48.8 m2 g−1 was obtained for the particles exposed to water for 24 hr, compared to the as-deposited 50 cycles of titanicone coated sample with a surface area of 7.7 m2 g−1. The decomposition of titanicone films, after exposure to water vapor for various lengths of time, was studied using Fourier transform infrared spectroscopy.