Sol-gel derived lead zirconate titanate: Processing, micrometer and nanometer scale patterning and characterization

To produce good quality films and patterns with high fidelity, the fabrication of PZT by sol-gel process was investigated, and various processing steps were studied. Sol-gel based PZT solutions were prepared and converted into thin films and patterns with spin coating and soft lithographic techniques, respectively. Structural and compositional analysis of the films and patterns was performed with XRD, and surface and topography were studied with HRSEM and AFM. Electrode deposition on the thin films and patterns were done with FIB, PLD and sputtering. The ferroelectric and dielectric properties of the film derived were also investigated.