Improved mechanical properties of SnO2:F thin film by structural modification

This study reports the improvement in the mechanical properties of SnO2:F (FTO) thin films through the modification of the structure and surface morphology. The FTO thin films are deposited on glass substrates by the atmospheric pressure chemical vapor deposition method on an industrial production line. Both the average grain size and the surface roughness were progressively increased by increasing the flow rate of metal organic monobutyltin trichloride (MBTC). The hardness and Young's modulus of the FTO films increased from 9.01 GPa to 15.08 GPa, and from 125.24 GPa to 206.93 GPa, respectively, according to the nanoindenter results. Post-heat treatment at 650 °C for 10 min resulted in a further increase in the hardness and Young's modulus, reaching maximum values of ~15.89 GPa and ~235.9 GPa, respectively. The enhancement in mechanical properties can be attributed to the reduced grain boundaries and the improved structural densification.