کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1462386 989631 2012 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Two-step sintering of aluminum-doped zinc oxide sputtering target by using a submicrometer zinc oxide powder
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سرامیک و کامپوزیت
پیش نمایش صفحه اول مقاله
Two-step sintering of aluminum-doped zinc oxide sputtering target by using a submicrometer zinc oxide powder
چکیده انگلیسی

Aluminum-doped zinc oxide (AZO) is a potential substitute for tin-doped indium oxide due to its versatility. The properties of AZO films are related to those of the AZO sputtering target. To improve the performances of AZO targets, two-step sintering was used to densify a submicrometer zinc oxide (ZnO) powder with a size of 0.4 μm to produce both AZO and ZnO targets.The results showed that the submicrometer ZnO powder cannot be densified by two-step sintering due to its coarse particle size and hexagonal structure. However, a 2 wt% additive of Al2O3 in ZnO can modify the kinetic window of two-step sintering and help in the densification. Using two-step sintering, the sintered density of the AZO target can be improved from 97.4% to 99.8%. The grain size is also reduced by 60%, from 9.1 μm to 3.6 μm.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Ceramics International - Volume 38, Issue 8, December 2012, Pages 6229–6234
نویسندگان
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