Corrosion of thin, magnetron sputtered Nb2O5 films

• Niobium oxide based films were obtained by DC magnetron sputtering.
• Different deposition times were tested.
• The best corrosion resistance was obtained for the Nb2O5 film produced at 15′.
• Film porosity determines the corrosion resistance.

Niobium oxide based thin films were deposited on AISI 316 stainless steel substrates using reactive DC magnetron sputtering. Structure, composition and corrosion resistance of the niobium oxide films were studied. The corrosion behavior of the specimens was evaluated by electrochemical impedance spectroscopy (EIS) and potentiodynamic polarization. The concentration of niobium and oxygen in the films was obtained by Rutherford backscattering spectroscopy (RBS). The film structure was analyzed by X-ray diffractometry. The corrosion resistance of the substrate was improved by the Nb2O5 layers. The best protective performance was achieved for the deposition time of 15 min.

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