Direct sub-nanometer scale electron microscopy analysis of anion incorporation to self-ordered anodic alumina layers

► Morphological and chemical characterization at atomic scale of porous alumina layers anodised in ordered regimes. ► Characterization based on the use of FEG-SEM, STEM-HAADF, STEM-EELS and STEM-X-EDS. ► Nanoscale distribution of P-, C- and S-bearing species in the pore wall.