کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1476742 991161 2008 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Integrating functional ceramics into microsystems
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سرامیک و کامپوزیت
پیش نمایش صفحه اول مقاله
Integrating functional ceramics into microsystems
چکیده انگلیسی

Micro electromechanical systems (MEMS) have applications in a diverse range of fields. The presence of a diverse range of materials imposes constraints in the design of, and use of fabrication technologies for, MEMS. In addition, the need to structure these materials on the micro-scale introduces additional challenges which need to be overcome. These issues are of particular importance when ceramics need to be incorporated into MEMS. It is of interest to incorporate ceramics into MEMS due to the desire to utilise their functional properties including piezoelectricity, ferroelectricity and conductivity.This paper will present a review of some potential solutions developed by the authors and found in literature, focussing on low-temperature processing of functional ceramics, selective chemical patterning, micro-moulding, and direct writing. The capabilities of different techniques are compared and the relative advantages of each explored.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of the European Ceramic Society - Volume 28, Issue 7, 2008, Pages 1397–1403
نویسندگان
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