کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1477171 | 991174 | 2009 | 9 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Study of deformation and porosity evolution of low temperature co-fired ceramic for embedded structures fabrication Study of deformation and porosity evolution of low temperature co-fired ceramic for embedded structures fabrication](/preview/png/1477171.png)
The deformation behaviors of suspended low temperature co-fired ceramic (LTCC) laminates over a cavity and the evolution of open porosity of LTCC are studied for the fabrication of embedded structures in a multi-layer LTCC platform using carbon material. The effects of the type of LTCC materials (self-constrained and unconstrained LTCC), cavity width, laminate thickness, and lamination conditions on the deformation of the suspended LTCC laminate over a cavity are studied. For suspended three-layers and six-layers LTCC laminates over cavity width ranges from 10 to 25 mm, the self-constrained LTCC laminates were more dimensionally stable (sagged by less than −120 μm) after sintering as compared to the unconstrained LTCC. The evolution of open porosity and the distribution of open pores in the self-constrained LTCC with changes in sintering temperature and laminate thickness are also studied for process optimization.
Journal: Journal of the European Ceramic Society - Volume 29, Issue 13, October 2009, Pages 2737–2745