Effects of composition and stacking sequence on dielectric properties of the multilayered (Pb,Sr)TiO3 thin films for tunable device application

Multilayered (Pb1−xSrx)TiO3 (PST(x)) thin films consisted of uniform, PST(x) and heterostructure, PST(x)–PST80 were synthesized by coating the solutions with different Sr contents (50 ≤ x, Sr(mol%) ≤80), respectively. Their structural and dielectric properties were investigated in terms of composition and stacking sequence of each film. Among uniform PST(x) thin films, the PST60 films showed the highest dielectric constant and tunability, while so lower figure of merit which is an important parameter for microwave tunable device application was obtained due to relatively higher dielectric loss. In an effort to bring down the dielectric loss, the PST(x) thin films were alternately coated with PST80 thin layer. Dielectric properties of the heterostructured PST(x)–PST80 films were found to be dependent on the intrinsic dielectric values of each film composition and corresponding phase transition temperature shift effect. Furthermore, surface roughness became smoother by inserting PST80 thin layer, resulting in decrease in dielectric loss. In case of the PST60–PST80 heterostructured film, despite of slight decrease in tunability, the figure of merit on account of lowered dielectric loss was effectively improved (>40%), compared to that of the uniform PST60 film.