The role of nitridation of nc-Si dots for improving performance of nc-Si nonvolatile memory

► The nc-Si dots array is used to store information for nonvolatile memory based on the principle of discrete charge storage. ► The treatment of nitridation of nc-Si dots can effectively improve the charge storage characteristics and program speed. ► The nitrided Si layer acted as a barrier for the carriers tunneling back to the channel and then enhanced the retention time.