کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1484669 | 1510525 | 2008 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Substrate holder biasing for improvement of microcrystalline silicon deposition process
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سرامیک و کامپوزیت
پیش نمایش صفحه اول مقاله
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چکیده انگلیسی
Application of a dual frequency plasma source for the deposition of microcrystalline silicon thin films from highly diluted SiH4/H2 was investigated in this paper. A positively or negatively biased low frequency voltage was applied on the substrate holder while the conventional frequency of 13.56Â MHz was used for the powered electrode. The results show a significant increase of the deposition rate and an improvement of the film crystallinity in the case of the positive biasing. Plasma diagnostics and modeling were used to understand the beneficial effect of positive biasing on the deposition process. The results revealed that the observed changes are not only due to the variation of ion flux and ion bombardment but also depend on the changes in the production and distribution of neutral species in the discharge space.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Non-Crystalline Solids - Volume 354, Issues 19â25, 1 May 2008, Pages 2208-2213
Journal: Journal of Non-Crystalline Solids - Volume 354, Issues 19â25, 1 May 2008, Pages 2208-2213
نویسندگان
X.D. Zhang, F.R. Zhang, E. Amanatides, D. Mataras, S.Z. Xiong, Y. Zhao,