کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
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1490237 | 992320 | 2010 | 6 صفحه PDF | دانلود رایگان |
Lanthanum acetylacetonate La(C5H7O2)3·xH2O has been used in the preparation of the precursor solution for the deposition of polycrystalline La2O3 thin films on Si(1 1 1) single crystalline substrates. The precursor chemistry of the as-prepared coating solution, precursor powder and precursor single crystal have been investigated by Fourier Transformed Infrared Spectroscopy (FTIR), differential thermal analysis coupled with quadrupole mass spectrometry (TG-DTA-QMS) and X-ray diffraction. The FTIR and X-ray diffraction analyses have revealed the complex nature of the coating solution due to the formation of a lanthanum propionate complex. The La2O3 thin films deposited by spin coating on Si(1 1 1) substrate exhibit good morphological and structural properties. The films heat treated at 800 °C crystallize in a hexagonal phase with the lattice parameters a = 3,89 Å and c = 6.33 Å, while at 900 °C the films contain both the hexagonal and cubic La2O3 phase.
Journal: Materials Research Bulletin - Volume 45, Issue 9, September 2010, Pages 1203–1208