Effect of plasma CVD operating temperature on nanomechanical properties of TiC nanostructured coating investigated by atomic force microscopy

The structure, composition, and mechanical properties of nanostructured titanium carbide (TiC) coatings deposited on H11 hot-working tool steel by pulsed-DC plasma assisted chemical vapor deposition at three different temperatures are investigated. Nanoindentation and nanoscratch tests are carried out by atomic force microscopy to determine the mechanical properties such as hardness, elastic modulus, surface roughness, and friction coefficient. The nanostructured TiC coatings prepared at 490 °C exhibit lower friction coefficient (0.23) than the ones deposited at 470 and 510 °C. Increasing the deposition temperature reduces the Young's modulus and hardness. The overall superior mechanical properties such as higher hardness and lower friction coefficient render the coatings deposited at 490 °C suitable for wear resistant applications.

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► The TiCx nanostructure coatings have been deposited by PACVD method.
► Dominant mechanism of growth structure at 490 °C is island-layer type.
► TiCx nanostructure coating applied at 490 °C, exhibits lowest friction coefficient.
► Young's moduli are 289.9, 400 and 187.6 GPa for 470, 490 and 510 °C, respectively.
► This higher elastic modulus and higher hardness of nanocoating obtain at 490 °C.