Optical and electronic properties of highly stable and textured hydrogenated ZnO:Al thin films

► We investigate the impact of hydrogen treatment at high temperature of ZnO:Al film. ► Electrical properties of the ZnO:Al films improved due to hydrogen annealing. ► Optical properties of the ZnO:Al films enhanced due to hydrogen annealing. ► ZnO:Al film properties strongly depend on the hydrogen treatment temperature.