Au nanoparticles formation in ZnO/SiO2 interface by 10 MeV Si3+ irradiation

This research proposes a method to obtain Au nanoparticles (NPs) at a ZnO/SiO2 interface. Initially a well defined Au thin film was grew between of ZnO film and SiO2 glass layers. Post-treatment of 10 MeV Si3+ irradiation or/and thermal annealing treatments were used. Samples were analyzed by Optical Absorption Spectroscopy, Rutherford Backscattering Spectrometry, X-Ray Diffraction and Transmission Electron Microscopy. Results showed the pulverization of initial Au thin film and the formation of NPs in both sides of ZnO/SiO2 interface and in between. In general the formations of Au NPs sizes inside both matrices were between 3 and 8 nm. Last thermal treatment was important because caused the ZnO film recovery from irradiation damage.

► Initial multilayers system SiO2/Au/ZnO was growth with magnetron sputtering DC and RF.
► The systems were treatment with a combination of irradiation of 10 MeV Si3+ and thermal annealing.
► Order and kind of treatment has influenced in the Au nanoparticles (NPs) formation.
► Samples were analyzed by Optical Absorption Spectroscopy, Rutherford Backscattering Spectrometry and X-Ray Diffraction.
► Results showed the pulverization of initial Au thin film and the formation of NPs in both sides of ZnO/SiO2 interface.