کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1496996 | 992982 | 2008 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Batch process for the fabrication of LiNbO3 photonic crystals using proton exchange followed by CHF3 reactive ion etching
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سرامیک و کامپوزیت
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Batch process for the fabrication of LiNbO3 photonic crystals using proton exchange followed by CHF3 reactive ion etching Batch process for the fabrication of LiNbO3 photonic crystals using proton exchange followed by CHF3 reactive ion etching](/preview/png/1496996.png)
چکیده انگلیسی
We report a simple process for the batch fabrication of photonic crystals in lithium niobate substrates. By means of proton-exchange (PE) followed by CHF3 reactive ion etching (RIE) we have achieved structures with a diameter of 400 nm and an aspect ratio (depth-to-diameter) of 3:1. Sub-micrometric structures have been fabricated with an 85° angle between the walls and the plane of the substrate. We provide the optimized parameters – and their influence on the aspect ratio, the etching rate and the verticality of the walls. Transversal cross-section micrographs of the etched patterns, for both X-cut and Z-cut substrates, are shown as a clear evidence of the capability developed.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optical Materials - Volume 31, Issue 2, October–December 2008, Pages 196–200
Journal: Optical Materials - Volume 31, Issue 2, October–December 2008, Pages 196–200
نویسندگان
G. Ulliac, N. Courjal, H.M.H. Chong, R.M. De La Rue,