Improved mechanical properties of sputtered and evaporated Zn films deposited on a flexible substrate with an adhesive layer of amorphous ZrCu film

Zn films with or without a 15 nm amorphous ZrCu adhesive layer are coated onto flexible polyimide substrate by sputtering and evaporation. Their tensile behavior is evaluated. The sputtered Zn films possess a nanogranular morphology measuring 30 ± 10 nm in diameter, while the evaporated Zn films show a hexagonal plate-like structure measuring 300 ± 100 nm in width. The amorphous ZrCu membrane functions as a good adhesive layer in reducing the microcrack occurrence during tensile deformation, especially for evaporated Zn films.