Comparison of intrinsic residual stress models in metallic thin films

In this contribution, a comparison between different residual stress models, namely Guisbiers–Van Overschelde–Wautelet (GVW), Nix–Clemens (NC) and Freund–Chason (FC), is proposed. The NC model is found to greatly overestimate the intrinsic residual stress, whereas the GVW and FC models provide the correct order of magnitude. The main advantage of the GVW model is a prediction of the correct intrinsic residual stress trend in the pre-coalescence stage and a suitable upper limit estimation in the post-coalescence stage.