Dielectric properties and high tunability of (1 0 0)-oriented Ba(Zr0.2Ti0.8)O3 thin films prepared by pulsed laser deposition

Highly (1 0 0)-oriented Ba(Zr0.2Ti0.8)O3 (BZT) film with nano-sized grains of 30–50 nm is deposited on Pt/Ti/SiO2/Si substrate by pulsed laser deposition. The dielectric constant and loss tan δ at a frequency of 1 MHz are 792 and 0.020, respectively. The tunability is 69% at 187.5 kV/cm.