Optical properties of amorphous HF–In–Zn–O thin films estimated from transmission spectra

• a-HIZO thin films deposited at different substrate temperatures.
• Wemple–DiDomenico model used for refractive index dispersion.
• Lower optical band gap and higher refractive index at higher substrate temperature.

Amorphous and flat (<1 nm roughness) Hf–In–Zn–O thin films were prepared by radio frequency (rf) magnetron sputtering method at room temperature (RT) and at 300 °C substrate temperature. The crystal structure and surface morphology were investigated by high resolution X-ray diffraction (HR-XRD) and atomic force microscopy (AFM), respectively. Optical properties of these films were obtained from the UV–VIS–NIR transmission spectra, at normal incidence, over the 200–2000 nm spectral range. Swanepoel's method was used to calculate the thickness and the refractive index of the films. The dispersion of refractive index was obtained in terms of the single-oscillator Wemple–DiDomenico model. The optical absorption edge was described using the direct transition model proposed by Tauc. The film deposited at higher substrate temperature had lower optical band gap, higher refractive index, higher oscillator strength and energy of the effective dispersion oscillator. Optical characterization shows that films become more stable, relaxed and rigid at higher substrate temperature.