Sequence of deformation and cracking behaviours of Gallium-Arsenide during nano-scratching

► Median cracks are created first followed by lateral and finally radial cracks. ► All cracks follow a power-law relationship between scratching force and crack depth. ► The scratching depth, the residual pile-up, the residual scratch depth follow a power-law dependence. ► Under sratching, only slip bands and perfect dislocations are visible. ► For the first time, a sequence for the deformation and cracking behaviour is given.