Growth process conditions of tungsten oxide thin films using hot-wire chemical vapor deposition

► Process parameters to control hot-wire CVD of WO3−x are categorized. ► Growth time, oxygen partial pressure, filament and substrate temperature are varied. ► Chemical and crystal structure, optical bandgap and morphology are determined. ► Oxygen partial pressure determines the deposition rate up to as high as 36 μm min−1. ► Nanostructures, viz. wires, crystallites and closed crystallite films, are controllably deposited.