High temperature properties of CrAlN, CrAlSiN and AlCrSiN coatings - Structure and oxidation

► Deposition and structural analysis of CrAln, CrAlSiN and AlCrSiN coatings. ► In-situ XRD analysis at high temperature. ► AlCrSiN coating showed the highest oxidation resistance and thermal stability. ► CrAlN outperformed CrAlSiN film both in oxidation resistance and thermal stability.