Characterization of porous silicon nitride/silicon oxynitride composite ceramics produced by sol infiltration

Porous silicon nitride/silicon oxynitride composite ceramics were fabricated by silica sol infiltration of aqueous gelcasting prefabricated Si3N4 green compact. Silica was introduced by infiltration to increase the green density of specimens, so suitable properties with low shrinkage of ceramics were achieved during sintering at low temperature. Si2N2O was formed through reaction between Si3N4 and silica sol at a temperature above 1550 °C. Si3N4/Si2N2O composite ceramics with a low linear shrinkage of 1.3–5.7%, a superior strength of 95–180 MPa and a moderate dielectric constant of 4.0–5.0 (at 21–39 GHz) were obtained by varying infiltration cycle and sintering temperature.