کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1529128 | 995738 | 2011 | 4 صفحه PDF | دانلود رایگان |
Al foil was coated with niobium oxide by cathodic electroplating and anodized in a neutral boric acid solution to achieve high capacitance in a thin film capacitor. X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD) revealed the niobium oxide layer on Al to be a hydroxide-rich amorphous phase. The film was crystalline and had stoichiometric stability after annealing at temperatures up to 600 °C followed by anodizing at 500 V, and the specific capacitance of the Nb2O5–Al2O3 composite oxide was approximately 27% higher than that of Al2O3 without a Nb2O5 layer. The capacitance was quite stable to the resonance frequency. Overall, the Nb2O5–Al2O3 composite oxide film is a suitable material for thin film capacitors.
► We fabricate Nb2O5–Al2O3/Al film for high performance thin film capacitor.
► The optimum condition of electrolyte composition will coat NbOx on Al without corrosion of Al during the cathodic electroplating.
► Increasing annealing temperature will form Nb2O5 crystalline.
► The Al2O3 layer will form between Nb2O5 layer and metal Al after anodizing and the thin film capacitor with Nb2O5–Al2O3/Al improve dielectric properties.
Journal: Materials Science and Engineering: B - Volume 176, Issue 18, 15 November 2011, Pages 1505–1508