Structural, morphological and magnetic characteristics of Tb-implanted GaN and AlGaN films

► The annealing process is helpful to obtain high-quality films. ► All the annealed samples exhibit clear room-temperature ferromagnetism behavior. ► The room temperature ferromagnetism can be explained by BMP theory. ► The saturated magnetization value of the AlGaN:Tb sample is much stronger. ► The incorporated Al atoms play an important role in impacting the magnetization.